| abstract |
(57) [Problem] To provide an electroless plating method capable of reliably improving adhesion to a wide range of resin materials by a simple method. After irradiation with far ultraviolet rays having a wavelength of 350 nm or less, electroless plating is performed. The surface of a water-repellent resin material such as a photoresist is modified to be hydrophilic by irradiation with far ultraviolet rays. Further, in addition to the surface modification by irradiation with far ultraviolet rays, by adsorbing a surfactant, for example, a silane coupling agent having an amino-based functional group, the application of, for example, a tin-palladium-based catalyst is promoted, and the adhesion is further improved. , And electroless plating is formed. |