http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10303191-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2eab00a738cc1c8199b43d6592aa02e1 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 1997-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_123f3861f35e240b2b99871162dcde62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_777807bc0d98cc1b6a6e28d3e13cfa40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79696a02a353ee975a4cfcb817c081e8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5770fe76a84f85fc0a35eb14d3fb9604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fba75a984cc3e4b8e596340f42d8f2a |
| publicationDate | 1998-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10303191-A |
| titleOfInvention | Deposition method of uniform dielectric layer |
| abstract | An object of the present invention is to provide a method of depositing a uniform dielectric layer that removes a non-uniform phenomenon of a residual charge distribution and uniformly deposits a dielectric layer. To achieve the above object, a method for depositing a uniform dielectric layer according to the present invention comprises the steps of (a) providing a substrate; (B) Plasma enhanced chemical vapor deposition (PECVD) Depositing a first dielectric material on the substrate; (C) introducing an oxygen plasma to remove a non-uniform phenomenon of the charge distribution on the substrate surface; and (d) on the first dielectric film treated with the enzyme plasma by a chemical vapor deposition (CVD) method. Depositing a second dielectric material on the substrate to obtain a dielectric layer having a uniform thickness on the substrate. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017147438-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001077104-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015501551-A |
| priorityDate | 1997-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.