| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7f278bf3e3bd12896f71fc0e87dd1684 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-44 |
| filingDate |
1997-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0a26139b4b1350a84e80f2094a0ba02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab995b023ab0744533ad591599575c33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e42e729679fe327cb184a3ea42a6fc60 |
| publicationDate |
1998-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H10199473-A |
| titleOfInvention |
Method and apparatus for analyzing substrate incident negative ions in etching plasma |
| abstract |
(57) [PROBLEMS] To provide a method and an apparatus for measuring negative ions incident on a substrate from plasma in an etching apparatus for etching a substance on a semiconductor, an electronic component, or another substrate using plasma. provide. Kind Code: A1 Abstract: Negative charged particles incident on a substrate electrode by applying high-frequency power to the substrate electrode are drawn out through an opening provided in the substrate electrode, and closed in a direction perpendicular to the flowing direction of the drawn out negative charged particles. The magnetic circuit is configured to apply a weak vertical magnetic field to eliminate electrons of the negatively charged particles and pass only negative ions to perform energy and mass analysis. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008502145-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2021200773-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021200773-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001210270-A |
| priorityDate |
1997-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |