| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B31-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-52 |
| filingDate |
1996-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64c140bde165dc8298fe42ba69ad5dd6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5264c8ba0ccd36c2bf300360c04107db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63bb077ddf389cebeed99e0bb1f7bd22 |
| publicationDate |
1998-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H10152376-A |
| titleOfInvention |
Electrode plate for plasma etching |
| abstract |
(57) [Problem] To provide an electrode plate for plasma etching which has a small number of foreign substances such as carbon particles which drop and adhere to a wafer surface during etching and has a low consumption rate. SOLUTION: An electrode plate for plasma etching made of glassy carbon in which the largest constituent particles at a predetermined location have a particle diameter in a range of 5 to 60 nm. |
| priorityDate |
1996-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |