http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10147572-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-55 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D209-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D221-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D211-88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D207-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 1996-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0afceff476b9b1ad2586404a53ba56fd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f88a3c40bc40b3386541b9a5da7321ba |
| publicationDate | 1998-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10147572-A |
| titleOfInvention | Sulfonate compound and use thereof |
| abstract | PROBLEM TO BE SOLVED: To provide a compound having a protective group which can be cleaved by the action of an acid and exhibiting an excellent effect when used as an acid generator of a resist containing a resin which becomes alkali-soluble after cleavage. And a resist composition having excellent various properties is provided by using the same. SOLUTION: A sulfonic acid ester compound represented by the formula (I). In the formula, R 1 represents a divalent residue of an optionally substituted alkylene, alkenylene or cyclic hydrocarbon, R 2 represents an optionally substituted cycloalkyl, and n is an integer of 0 to 6 Where-(CH 2 ) n -R 2 is never a camphor residue. By using the compound of the formula (I) as an acid generator and having a protecting group which can be cleaved by the action of an acid and blending with an alkali-soluble resin after cleavage, a positive resist composition can be obtained. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014148498-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018002707-A |
| priorityDate | 1996-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 88.