| abstract |
As a radiation-sensitive acid generator that is sensitive to actinic radiation, especially KrF excimer laser, ArF excimer laser, EUV, and other far-ultraviolet rays and electron beams, it exhibits good flammability and is capable of accumulating in the human body. In addition, the acidity of the generated acid (photogenerated acid) is sufficiently high, and the generated acid (photogenerated acid) not only has an appropriate boiling point, but also has a moderately short diffusion length in the resist film. Furthermore, the present invention provides a sulfonic acid onium salt that functions as a novel photoacid generator and a sulfonic acid derivative that functions as a photogenerated acid, which are excellent in solubility in a resist solvent and compatibility with a resin. The problem is solved by an onium sulfonate represented by the following formula (1). Embedded image (In the formula (1), R 1 represents a monovalent organic group, Q + represents a sulfonium cation or an iodonium cation) [Selection figure] None |