| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ad78b36d08c20f06075145cc1caf3ac8 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
| filingDate |
1996-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e1555d3c2dabba7f4e0bdb9a4f5a56e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47db7f4dfc7abc820b5daa567328d98f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2abce2bd436e10c3e3f6f6c86a88be0a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85e6923b7472d4098578ff972ac4e1a5 |
| publicationDate |
1998-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H10114781-A |
| titleOfInvention |
Complex of β-diketone compound with glycolate of group IV metal |
| abstract |
(57) [Problem] To provide a metal complex compound which has low reactivity with other CVD materials and does not change its volatile characteristics even as a mixture, and is useful as a CVD material. The complex of the present invention with a β-diketone compound and a glycolate of a Group IV metal is represented by the following general formula (I). Embedded image |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6603033-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2322690-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6743933-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8952188-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2322530-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100435816-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8471049-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009073858-A |
| priorityDate |
1996-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |