| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a258fbf53a4ae7f921767140d611c06 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C49-92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 |
| filingDate |
2008-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff8ec9c695f4bcad6065b9c0463b98ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc8befcb4102fd7d87ff45bc242907f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b3e3ab1246eb71c70e37ed9c153b341
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ecf4c6dc7c6d04f1b66912e822de180
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcfa62436881cbb9c81373e4f60bce3b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e81a47562f90b747bd9851cd07809b39 |
| publicationDate |
2009-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009073858-A |
| titleOfInvention |
Chemical vapor deposition precursor |
| abstract |
A Zr substitute precursor for use in MOCVD is provided. General formula: Zr x (OR) y L z (wherein R is an alkyl group; L is a β-diketonate group; x = 1 or 2; y = 2, 4 or 6) Z = 1 or 2). A zirconium precursor used to deposit a thin film of zirconium oxide or a thin film containing zirconium oxide using the MOCVD method. [Selection figure] None |
| priorityDate |
1997-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |