http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1010743-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1996-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_652bd87760ee116eaacea75860b24323 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f10189bd84037f6419b9de626cf59a18 |
| publicationDate | 1998-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H1010743-A |
| titleOfInvention | Resin coating material and resist pattern forming method |
| abstract | (57) Abstract: A method for forming a resin coating material and a resist pattern, wherein when a pattern is formed using a chemically amplified resist, a simple means is employed to reduce the film loss and reduce the cross section. To obtain a rectangular pattern. SOLUTION: A first heat treatment is performed after a chemically amplified resist film 2 is formed on an etching object 1, and then a water-insoluble resin having a sufficiently low water content is formed on the chemically amplified resist film 2 ( For example, a resin coating material film 7 containing a polyolefin-based polymer) and a basic compound (for example, an aromatic amine, an aliphatic amine, an alkylamine-based, etc.) is formed. A second heat treatment is performed, and then the resin coating material film 7 is peeled off and then developed. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001166489-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100574993-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7270937-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100641917-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013051442-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100400331-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6764806-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9046768-B2 |
| priorityDate | 1996-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.