| abstract |
(57) [Summary] (Modified) SOLUTION: The phenyl group in the molecule has at least one acid labile group and is linear, branched or cyclic. A sulfonium salt having an alkyl sulfonate of (In the formula, R 1 is an alkyl group, an alkoxy group or a dialkylamino group, OR 2 is an acid labile group, and Y is 1 to 1 carbon atoms. The alkyl sulfonate of 20 may contain a carbonyl double bond, an ether bond or an alcoholic hydroxyl group in the structure. n is an integer of 0 to 2, m is an integer of 1 to 3, n + m is 3, r is an integer of 1 to 5, p is an integer of 0 to 5, q is an integer of 0 to 4, and q + r is 1 to 5. It is an integer. The sulfonium salt of the formula (1) is effective as a component of a chemically amplified positive resist material having high resolution suitable for fine processing technology. |