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publicationDate 1997-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H09316666-A
titleOfInvention Cylindrical photomask, manufacturing method thereof, and method of forming dynamic pressure generating groove using cylindrical photomask
abstract (57) [Summary] [Problem] A conventional photomask for forming a dynamic pressure generation groove has a poor circularity, poor dimensional accuracy, and a large dimensional variation among products. Since it is impossible to form a pattern, it is impossible to form a dynamic pressure generation groove having a pattern faithful to the design pattern. By using an electroforming method, it is possible to fit an exposed portion 11 in which a photoresist layer 10 is applied and formed on a surface of a processed portion 91 of a dynamic pressure generation groove forming object 9 and to obtain a desired dynamic pressure. The metal cylindrical photomask 7 in which the through holes 8 having the pattern of the generation groove is formed is manufactured.
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