http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014501934-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-92 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 |
| filingDate | 2011-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014501934-A |
| titleOfInvention | Mask for near-field lithography and method of manufacturing the same |
| abstract | A method of manufacturing a nanopatterned cylindrical photomask is disclosed. A master pattern having elements ranging in size from about 1 nanometer to about 100 micrometers may be formed on the master substrate. The layer of elastomeric material may be formed on the surface of a transparent cylinder. The master pattern may be transferred from the master to a layer of elastomeric material on the surface of the transparent cylinder. Instead, a nanopatterned cylindrical photomask is manufactured by forming a pattern with nanometer scale elements on an elastomeric substrate and laminating the patterned elastomeric substrate onto the surface of the cylinder. May be. In other methods, a layer of elastomeric material may be formed on the surface of a transparent cylinder, and a pattern having nanometer scale elements may be formed on the elastomeric material by a direct patterning method. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200025233-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102096606-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102450952-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220019992-A |
| priorityDate | 2010-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.