http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09292709-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_385752f237551ca1b257f160a0f2434b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 |
| filingDate | 1997-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55852a44a10e08f7bf2959f215061f03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_362fadf841f39c02ff6fe2a8a6dfc5b7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_191522f046bcc0166642306fc84b007f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3f52c36369747976f05808018167f46 |
| publicationDate | 1997-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H09292709-A |
| titleOfInvention | Radiation-sensitive composition |
| abstract | (57) [Abstract] (Correction) [Problem] Chemically amplified positive type resist capable of stably forming a high-precision fine pattern and effectively sensitive to various radiations such as ultraviolet rays, far ultraviolet rays, and X-rays. I will provide a. SOLUTION: The (A) copolymer consisting of the repeating units represented by the general formulas (1) and (2), the (B) copolymer consisting of the general formulas (1) and (3), and the radiation-sensitive acid generation. A radiation-sensitive composition comprising an agent. R 1 represents a hydrogen atom or a methyl group. R 6 represents a hydrogen atom or a methyl group. Here, R 2 is a hydrogen atom or a methyl group, R 3 is a hydrogen atom, a chain alkyl group having 1 to 10 carbon atoms, R 4 and R 5 are each independently a chain alkyl group having 1 to 10 carbon atoms, Or R 3 , R 4 and R Any two of 5 may combine with each other to form a 5- to 7-membered ring. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001356481-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4493938-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002055457-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004361803-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4695282-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6433118-B1 |
| priorityDate | 1996-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 394.