http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09258451-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 1996-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_030d834d1b878634403cec0bb127167d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_963b2468f8078b40ee1a5d8c571bd978 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21c7c58cbbddd5736d90f246f12075b5 |
| publicationDate | 1997-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H09258451-A |
| titleOfInvention | Method for forming photosensitive resin film pattern and method for manufacturing semiconductor device |
| abstract | (57) Abstract: To provide a method for forming a resist pattern having a good shape. SOLUTION: A step of sequentially forming an organic film and a photosensitive resin film on a workpiece, a step of selectively exposing the photosensitive resin film, and a development of the selectively exposed photosensitive resin film. And a step of forming a photosensitive resin film pattern, wherein the organic film is a first substance that generates a radical by the exposure, is excited, or generates an acidic or basic decomposition product. A second substance that acts as a radical scavenger for the radicals, acts as a quencher for the first substance, or neutralizes the acidic or basic decomposition product. And |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000187331-A |
| priorityDate | 1996-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 78.