http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09252124-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| filingDate | 1996-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da29e58da46ea75d3b421dc54b0971fd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_276008c704c184d58512b332d6781d2f |
| publicationDate | 1997-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H09252124-A |
| titleOfInvention | Semiconductor device and manufacturing method thereof |
| abstract | (57) Abstract: A high-speed semiconductor device having no malfunction is provided. A semiconductor substrate having a gate insulating film formed on the surface thereof, a gate electrode formed on the surface of the gate insulating film, and a surface region of the semiconductor substrate sandwiching the gate electrode from both sides. Formed impurity regions 7a, 7 b, 10a, 10b, the first sidewall insulating film 9 formed on the sidewall of the gate electrode, the interlayer insulating film 14 formed on the surface of the gate electrode and provided with the sidewall, and the interlayer insulating film Second sidewall insulating film 17 formed on the sidewall of the film And a wiring formed in the opening 15 surrounded by the second sidewall insulating film and connected to the impurity region. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007048837-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5062166-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100475118-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4550685-B2 |
| priorityDate | 1996-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.