http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09236923-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2e1ea5cf6944cd5f83d76f3ceaae5048
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
filingDate 1996-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b49b0284bc7090ee2510a0b78399ca72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ba19b9ad6a23eaf2c39a5b47df80b77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e75cacf78b29df46a68a19bc126c584
publicationDate 1997-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H09236923-A
titleOfInvention Positive photoresist composition
abstract (57) Abstract: A positive pattern using an alkali-soluble novolac type resin capable of forming a resist pattern having excellent adhesion to a substrate in the production of semiconductor devices, LCDs, etc. without impairing the storage stability of the resist. Providing a photoresist composition. SOLUTION: For a basic composition consisting of an alkali-soluble novolac type resin and a quinonediazide group-containing compound, The following formula (I) (Wherein R 1 represents a vinyl group, a benzyl group, a C1 to C5 alkyl group, a hydrogen atom, and R 2 represents a C1 to C5 alkyl group, a hydrogen atom). Positive photoresist composition.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100778636-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6218069-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7314701-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014153623-A
priorityDate 1996-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421453152
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412798128
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11450
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31242
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID94182
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433771398
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393356
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419541999
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530272
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419564793
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9015
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419574247
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420245121
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7267
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12769
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406907632
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530971
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410296072
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12101
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414206502
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410904264
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414863824
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546850
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID370
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490744
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8601
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539241
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414779695
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8896
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68463
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74976
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474382
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6997
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6937
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412469814
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416191751
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8663
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422035561
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411402389
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452987279
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521077
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18916270
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID79130
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68462
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6416
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12041
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422209161
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520057
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415767689
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419537854
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538525
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419508852
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1057
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID919792
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22323473
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10960
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14876011
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID335
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7249
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66171
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544127
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408271913
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11192
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419515884
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7393
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68156
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416102067
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17004
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421185142
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420955467
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2779371
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7564
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450614468
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11124
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6923
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421458550
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2879
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394834
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID795
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1390
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545847
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7041
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10687
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19710
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8114
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411653627
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421452453
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13622
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408729005

Total number of triples: 109.