http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09129607-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32229 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32706 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 1995-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a65d59aa48cdeac764baa5c454b69768 |
| publicationDate | 1997-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H09129607-A |
| titleOfInvention | Microwave plasma etching apparatus and method |
| abstract | Kind Code: A1 A microwave plasma etching apparatus and method capable of uniformly generating a high-density plasma in a large area even under a low pressure condition of about 1 mTorr without using a magnetic field and capable of performing ultrafine pattern etching on a large-area substrate at high speed. provide. A gas into the etching chamber, which is composed of a plasma etching chamber 101, a support means 102 for supporting a substrate 102 disposed in the etching chamber, and a flat plate having a large number of holes arranged so as to face the substrate support means. Introduction means 104 An exhaust means 105 in the etching chamber, a microwave introducing means using an endless annular waveguide 109 having a plurality of slots arranged around the etching chamber, and high-frequency power supply to the substrate support. And means. |
| priorityDate | 1995-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.