abstract |
(57) Abstract: Diffusion or deactivation of acid over time from exposure to heat treatment can be easily and appropriately performed, the dissolution inhibiting effect and developability are improved, and a good profile and high resolution are obtained. It is possible to provide a positive photosensitive composition having At least a structural unit having a compound capable of generating an acid upon irradiation with actinic rays or radiation and a structural unit having a group that decomposes by the action of an acid to increase the solubility in an alkaline developer and a structural unit having a basic nitrogen. A positive-type photosensitive composition comprising a resin. |