http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104199255-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-30 |
| filingDate | 2011-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104199255-B |
| titleOfInvention | Chemistry amplification negative resist composition and patterning method for EB or EUV lithographic printings |
| abstract | A kind of chemistry amplification negative resist composition is provided, including (A) alkali-soluble polymer, (B) acid producing agent, and the nitrogen-containing compound of (C) as basic component, the polymer (A) are changed into alkali-insoluble in presence of an acid catalyst.On side chain there is secondary or tertiary amine structure alkaline polymer to be used as component (A) and (C).The Resist patterns of fine size can be formed by EB or EUV lithographic process processing negative resist composition, advantage uniformly spreads including alkali, LER improves, the sour passivation in substrate interface is controlled and undercut degree reduces. |
| priorityDate | 2010-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 134.