abstract |
(57) [Summary] [Objective] Polysilazane, which is converted to silica by oxidation, is used to form a silica protective film by a coating method, which enables film formation under low temperature conditions. [Structure] After forming a polysilazane coating film on the substrate, This coating film is irradiated with light such as ultraviolet rays to be oxidized and polymerized to form a silica protective film. |