| abstract |
(57) [Summary] [Purpose] Even with a tube having a small inner diameter or a length longer than the inner diameter, a film can be uniformly or uniformly formed on the inner peripheral surface of the tube, and the tube can be manufactured with high productivity. Provided are a method and an apparatus capable of forming a film on a peripheral surface of a body. [Structure] A film forming tube S1 is arranged in a vacuum container 1, and a rod-shaped sputter target 2 to which a sputtering voltage is applied is arranged in the center thereof to maintain the inside of the container 1 at a predetermined film forming vacuum degree. At the same time, the plasma source gas is introduced into the tubular body S1 and the microwave is introduced into the tubular body S1, and at the same time, A magnetic field satisfying the ECR condition is applied to the introduced microwave inside the tubular body S1, and at this time, the magnetic field application position is set to the tubular body S1. The ECR resonance point is moved within the tubular body S1 by sequentially moving from one end to the other end in the film forming range inside the tube body S1, and the sputter target is sputtered by the generated plasma of the plasma source gas. Tube S 1. A film is formed on the inner peripheral surface. |