http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08288260-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 |
| filingDate | 1995-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abb18267de8d0ec051743e91ff5649ad |
| publicationDate | 1996-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H08288260-A |
| titleOfInvention | Helicon wave plasma ashing method |
| abstract | (57) [Summary] [Purpose] To ash a resist mask on which a surface-hardened layer is formed after ion implantation, without generating a pumping residue and suppressing damage. [Structure] Single loop antenna 6 for m = 0 mode plasma excitation, half-turn antenna 7 for m = 1 mode plasma excitation, wafer stage 9 that can be moved up and down in the direction of arrow B, and magnetic field control A helicon wave plasma CVD apparatus equipped with a switch 82 is used. First, the wafer stage 9 is raised to bring the wafer W closer to the helicon wave plasma P H , and the surface hardened layer is rapidly decomposed by using high density ions. Next, the wafer stage 9 is lowered, the switch 82 is turned off, the power supply to the half-turn antenna 7 is cut off, and radicals diffused from the inductively coupled plasma P I excited near the top plate 2 are removed. The remaining unaltered layer is removed. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6412498-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015037166-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6043004-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160117213-A |
| priorityDate | 1995-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.