abstract |
(57) [Abstract] [Purpose] Having radiation sensitivity, high resolution, and An object of the present invention is to provide a radiation-sensitive resin composition capable of easily forming a patterned thin film having excellent insulating properties, flatness, heat resistance, hardness, and transparency. [Structure] The radiation-sensitive resin composition of the present invention comprises (A) (A) 5 to 50% by weight of a constituent component derived from an unsaturated carboxylic acid and / or an unsaturated carboxylic acid anhydride, (b) 10 to 90% by weight of a constituent component derived from a radically polymerizable compound having an epoxy group, ( c) 10 to 70% by weight of constituents derived from other monoolefinic unsaturated compounds, And (d) 100 parts by weight of an alkali-soluble resin composed of 3 to 30% by weight of a constituent component derived from a conjugated diolefin unsaturated compound, and 5 to 100 parts by weight of a (B) 1,2-quinonediazide compound. It is characterized by |