| abstract |
(57) Abstract: A protective cap is formed on a top surface and a side surface of an air gap structure provided on an integrated circuit chip. The protective cap provides mechanical strength while providing a high density interconnect structure on the chip to prevent deformation of the sensitive structure (air bridge structure) and any contamination below the air bridge structure. It also prevents you from getting in. More specifically, the protective cap does not interfere with the performance of the air bridge and consequently does not need to be removed, which Eliminates the need to remove HDI structures. Further, with this protective cap, the additional area of the metal layer provides a stacked circuit for coupling a power or ground plane. |