| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f187eb8cb31e70d4acd428dd8beedd4f |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
1994-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_916a708ec7b85294b45cf7fe3ffff420 |
| publicationDate |
1996-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H08158073-A |
| titleOfInvention |
Chemical dry etching equipment |
| abstract |
(57) [Summary] [Purpose] To prevent damage to the quartz tube of a chemical dry etching system. [Structure] A protective member made of ceramic is attached to an inner wall of a microwave introduction portion of a quartz tube. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1014761-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000189745-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100792328-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111485228-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6725869-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2787677-A1 |
| priorityDate |
1994-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |