http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07331463-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01Q17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 1994-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38f9128e6b8ee9629dbd787f70de2b92 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcd1b56f803714f79c6d71847b6ce604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddc1f58052c1fb98335df3f8ded44e3d |
| publicationDate | 1995-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H07331463-A |
| titleOfInvention | Microwave propagation measurement method |
| abstract | (57) [Summary] [Structure] A material that absorbs microwaves and generates heat, for example, carbon, is applied to the surface of a material that changes irreversibly by heating, for example, thermal paper, and microwaves are used. Is configured to measure the electric field strength distribution of the. [Effect] Since the electric field intensity distribution of the microwave can be measured two-dimensionally without disturbing the propagation state of the microwave, there is an effect that the development period of the plasma processing apparatus using the microwave can be shortened. |
| priorityDate | 1994-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.