| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1993-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf5057bfa532b4d937c4d963bdc5f62d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6dd84f7b00e235ec7b7fa81b2592514
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83906275b3a95908f3cd5d69b9ab6b4e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e16109db9e34e69fb5be82c65fe2ead3 |
| publicationDate |
1994-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H0697128-A |
| titleOfInvention |
Method for patterning polyimide coatings during fabrication of multilayer metal structures |
| abstract |
(57) [Summary] (Modified) [Objective] It is an object of the present invention to provide a method of transferring a pattern through a polyimide underlayer during fabrication of a thin film multilayer metal structure. The method of the present invention comprises forming a fully cured thick polyimide layer 20 on a substrate 22. On top of this polyimide underlayer, a photosensitive silicon-containing polymer 2 Apply 8. Next, a resist pattern is formed by exposing through the resist layer and developing. Finally, the resist pattern is transferred into the polyimide underlayer by etching using only high density anisotropic O 2 plasma. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101234393-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210070260-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4574976-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004200659-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019029556-A |
| priorityDate |
1992-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |