abstract |
(57) [Summary] [Object] An object of the present invention is to provide a method for forming a complex oxide thin film, which enables a thick complex oxide thin film to be easily formed without cracks. [Structure] The thin film formed by applying and drying the sol solution on the upper surface of the substrate by the sol-gel method (steps S1 and S2) is irradiated with an irradiation line of predetermined energy (step S3). The thin film hydrolysis and polycondensation reactions are promoted. Therefore, since the composite oxide thin film is polymerized, cracks do not occur even in a thick composite oxide thin film. |