| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9a255559e1d94f20510a17a673b1078 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-331
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C9-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-067 |
| filingDate |
2011-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e589ce57e47ca45a5f5435e8550d769
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_248affe956893c034f97791fca1965c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f8c1586185836ee961c706b82229f29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e310b9bc082613f6a880c3ce54bce465
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_113b74e094d96abaa12f22a5a47dcd68 |
| publicationDate |
2013-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2013135165-A |
| titleOfInvention |
Thin film manufacturing apparatus, thin film manufacturing method, liquid droplet ejection head, and ink jet recording apparatus |
| abstract |
To provide a thin film manufacturing apparatus and a thin film manufacturing method capable of manufacturing a thin film such as an electromechanical conversion film by a simple process. The thin film manufacturing apparatus discharges a liquid onto a film formation target to form a coating film, continuously irradiates the coating film with laser light, and removes the solvent of the coating film. A first laser irradiation means for evaporating; and a second laser irradiation means for crystallizing the coating film from which the solvent has been evaporated by irradiating the coating film from which the solvent has been evaporated with pulsed laser light. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015056551-A |
| priorityDate |
2011-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |