http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06301201-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ba54aff29064e18f1e36be0d4d17be67 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 1994-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26889551d2ca4fa8706ce05b84e44c65 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13727ca10e611f824115e010084b5544 |
| publicationDate | 1994-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H06301201-A |
| titleOfInvention | Deep UV sensitive photoresist composition resistant to latent image collapse |
| abstract | (57) [Summary] [Object] To provide a positive working deep UV sensitive photoresist having improved critical dimension stability after UV irradiation and for an extended time before the baking step. The positive working deep UV sensitive photoresist is a tri-form of 3,5-dinitro-2,6-dimethylol paracresol, an acid stable polymer that is insoluble in water but is normally soluble in aqueous alkaline media. Photoacid generators represented by (2,1,4-diazonaphthoquinone sulfonate) esters, and mixed carbonate esters of tert-butyl alcohol and polyhydric phenols (of polymers normally soluble in alkaline media as described above). It is an acid labile compound that inhibits dissolution). |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102156385-A |
| priorityDate | 1993-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 105.