http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H06282071-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_385752f237551ca1b257f160a0f2434b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate | 1993-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ef427ad4ac614324dc1a9f809668891 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64c254556aa6220d47845fe3118f0712 |
| publicationDate | 1994-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H06282071-A |
| titleOfInvention | Radiation-sensitive resin composition |
| abstract | (57) [Summary] [Structure] The following formula [Chemical formula 1] (In the formula, R 1 represents a divalent organic group, two R 2 are the same or different and represent a group having a radiation-polymerizable carbon-carbon double bond, and two Z are the same or different. Represents an oxygen atom or -NH-, and n is 0 or 1.) A radiation-sensitive resin composition comprising a polymer (A) having a repeating unit represented by and a radiation-sensitive polymerization initiator. [Effect] The radiation-sensitive resin composition of the present invention has high light transmittance and solubility in a solvent, and at the same time, a thick film pattern having excellent heat resistance can be obtained. Therefore, the composition of the present invention can be used as both a resist material and an insulating material. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9758623-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021020344-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006133460-A |
| priorityDate | 1993-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 261.