| abstract |
(57) [Summary] [Object] To provide a three-component chemical amplification type positive-working photosensitive composition having high sensitivity, high resolving power, and good profile, and preventing precipitation over time. [Structure] (a) a novolak resin, (b) a compound capable of generating an acid upon irradiation with actinic rays or radiation, and (c) having a tertiary alkyl ester group, and having a solubility in an alkali developing solution. Molecular weight increased by 3, 000 or less in a positive photosensitive composition containing a low molecular compound having a single structure, the compound (c) is (I) a compound having at least two tertiary alkyl ester groups, wherein the distance between the ester groups is at the farthest position, and 10 or more bond atoms other than the ester group are present, or (ii) A compound having at least three tertiary alkyl ester groups and having 9 or more bond atoms excluding the ester groups at positions where the distance between the ester groups is the longest. |