| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9a1be0e5697d9ac3330ad2e40d26ae03 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 |
| filingDate |
1991-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10f43bd32525868a747197fb164de19a |
| publicationDate |
1993-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H0594898-A |
| titleOfInvention |
Plasma processing device |
| abstract |
(57) [Abstract] [Objective] To provide a plasma processing apparatus capable of precisely controlling the energy and density of ions incident on a substrate and easily controlling process parameters. To aim. [Configuration] High-frequency power waveform and high-frequency power measuring means; computing means for computing energy and density of ions incident on a substrate based on measured values; for storing process parameters determined in relation to plasma state Storage means; display means for displaying stored contents by output from the storage means; setting means for setting ion energy and density to predetermined values; ion energy value and density value in the setting means At least input means for inputting; and control means for controlling the energy and density of the ions in the device to set values according to the values set by the setting means. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7336795-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7657042-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011090850-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102771194-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009082109-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10777393-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8440572-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7876916-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8889021-B2 |
| priorityDate |
1991-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |