| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_129e393582e6bdf4029baf2206522f45 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-093
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
1991-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abf6438e1b5f9bc178672bfc45034177
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00580ccd35fb9924c04f52b6821777ac |
| publicationDate |
1993-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H0545873-A |
| titleOfInvention |
Two-layer structure radiation-sensitive resist and method for producing the same |
| abstract |
(57) [Summary] [Structure] A two-layer structure radiation-sensitive resist, characterized in that a thin film containing a conjugated polymer as a main component is interposed between a substrate and the radiation-sensitive resist, and a method for producing the same. [Effect] According to the present invention, it is possible to prevent a change in shape from a desired resist pattern due to a variation in the thickness of the radiation-sensitive resist film due to the reflection of radiation on the substrate, and to provide a high manufacturing yield. At the same time, the allowable range of process conditions in the manufacturing process can be expanded. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7501229-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006058497-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007017976-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4507759-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2005088398-A1 |
| priorityDate |
1991-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |