| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_366802749d278c1447279515ff2967f3 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 |
| filingDate |
1992-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9a34df605544a1e37d44fc69153e3e7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abc0e08183ff4a3b28e8856e8070939d |
| publicationDate |
1993-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H05304089-A |
| titleOfInvention |
Method and apparatus for removing resist from substrate surface |
| abstract |
(57) [Abstract] [Purpose] When the resist film is removed from the surface of the substrate after reactive ion etching, the resist and silicon oxide are completely removed from the substrate in one process step. It can be so. [Structure] Steam of anhydrous sulfuric acid 16 and steam of hydrofluoric acid 20 are supplied to the surface of a substrate 10 on which a resist film is formed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004511896-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6599438-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8475666-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008270824-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8440388-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9160588-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6231775-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009517865-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4728402-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9939382-A1 |
| priorityDate |
1992-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |