| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3af3390937c06df72b00e23a42cf63ef |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1992-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_995ca5e0e89fc427687fb127c27976ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89f8f71540d41442bcada52c6f4af3db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a284ce3e1318683b461b1a66391b991e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c79807c1a82463a19835dc2aafdf31c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a3a12c597538d65a3c585115f16a9fe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53db009968d93b4575f5e70bfd49181b |
| publicationDate |
1993-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H05249673-A |
| titleOfInvention |
Radiation-sensitive composition containing polymer having labile group |
| abstract |
(57) Abstract: The present invention provides a radiation-sensitive composition having a polymer binder of phenol units and cyclic alcohol units. [Structure] At least a part of a phenol unit and / or a cyclic alcohol unit of a polymer is bonded to an acid labile group. A high degree of solubility difference between the exposed and unexposed areas is obtained by only substituting the acid labile groups for the binder to a moderate extent. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8007981-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6010826-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007015352-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003248316-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007041313-A |
| priorityDate |
1991-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |