http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H05171471-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 1991-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e12b292c733e5400af466e689b6b228 |
| publicationDate | 1993-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H05171471-A |
| titleOfInvention | Method for etching substance containing 3d transition metal |
| abstract | (57) [Summary] [Structure] The sample 5 containing a 3d transition metal as a main constituent element is heated in vacuum to a temperature range of at least 200 ° C. and below the melting point of the sample by using an infrared lamp 8 or the like. Meanwhile, etching is performed using the gas 10 containing iodine as a constituent element. [Effect] Since reactive ion etching of a material containing a 3d transition metal as a main constituent element can be performed with low input power, processing with low damage is realized. At the same time, since a high etching rate is realized, the throughput at the time of product manufacturing is improved. Further, since a high rectangular cross-section processing is realized, it is possible to manufacture a product having a high degree of integration. In addition, since corrosion can be suppressed, highly reliable products can be manufactured. Since it becomes possible to process alloys containing 3d transition metals such as V and Mn, The present invention can be applied to a field where conventional fine processing has not been realized. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005011941-A |
| priorityDate | 1991-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.