| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 |
| filingDate |
1991-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d9b2c657267df28f97723e96a48ddb9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6288c330a9c489e89660ec84309f41aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f12a8ea14f6f8b684b4e4ea63b4c0153
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee0c431d189350b4b95582760920d4cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92d6cab31a8b4b8b0abe7228b323f72a |
| publicationDate |
1993-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H05102092-A |
| titleOfInvention |
Plasma processing method |
| abstract |
(57) [Summary] [Object] The present invention relates to a plasma processing method, and an object of the present invention is to realize a plasma processing method using hydrogen that accelerates the processing of hydrogen atoms and hydrogen ions. [Configuration] A first gas containing hydrogen molecules as a main component and the first gas A second gas containing hydrogen in an amount less than that of the first gas, and a first step of supplying the second gas into the chamber (8); Second step of performing plasma treatment on the workpiece surface (1) by generating plasma of a mixed gas consisting of the above gases in the chamber (8), and the second gas contains hydrogen and oxygen. It is composed of an organic compound or an inorganic compound containing hydrogen. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180021156-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017029961-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012049560-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017029961-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101333831-B1 |
| priorityDate |
1990-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |