http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H04128760-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_630b360599ea5cf4b5bcbc0c6c0a3e2d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1990-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_467d462d439e8f0b02a39d47b9a052e4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bbbcbd53fe5f0e5f094684b17370fac http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3afa54dbba2bad5b0e8abef314ff4627 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e969aecc6ecf2cb2bab8391e766d3c9 |
| publicationDate | 1992-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H04128760-A |
| titleOfInvention | Negative type photosensitive composition |
| abstract | PURPOSE: To allow lithography of a high resolving power to be executed by short-time exposing by using a specific compd. as a crosslinking agent. n CONSTITUTION: The compd. expressed by formula I and/or formula II is used as the crosslinking agent. In the formula I, R 1 denotes an alkyl group; A denotes an alkyl group which may be substd., alkenyl group, aryl group or 5- to 6-membered arom. heterocyclic group; B denotes a hydrogen atom or -CH 2 OR 2 ; R 2 denotes an alkyl group. In the formula II, X denotes a bivalent org. group; D 1 to D 4 respectively independently denote a hydrogen atom or -CH 2 OR 3 ; R denotes an alkyl group; (n) denotes 0 or 1; at least two of D 1 to D 4 are not the hydrogen atoms. The lithography of the high revolving power is executed by the short-time exposure in this way by using the light of the wavelength of a deep UV region. n COPYRIGHT: (C)1992,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE38256-E http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013244178-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5389491-A |
| priorityDate | 1990-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.