http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7184252-B2
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
filingDate | 2018-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2022-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2022-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-7184252-B2 |
titleOfInvention | Etching method and etching apparatus |
priorityDate | 2018-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
---|---|
isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579069 |
Total number of triples: 10.