http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7166367-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate | 2021-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-7166367-B2 |
| titleOfInvention | Semiconductor device manufacturing method, substrate processing method, substrate processing apparatus, and program |
| priorityDate | 2021-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.