| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q11-1015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q11-1069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q11-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23B27-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q11-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q11-00 |
| filingDate |
2018-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-7150390-B2 |
| titleOfInvention |
processing equipment |
| priorityDate |
2018-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |