Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-266 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-264 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-263 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-261 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3427 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-0042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-266 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-264 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3209 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2079 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-261 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-263 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-5022 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
filingDate |
2017-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2022-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2022-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-7114842-B2 |
titleOfInvention |
Cleaning formulation for removing residue on semiconductor substrates |
priorityDate |
2016-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |