| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-08 |
| filingDate |
2020-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-7042320-B2 |
| titleOfInvention |
Single crystal metal oxide semiconductor epi growth device |
| priorityDate |
2020-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |