| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S2304-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-0083 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02521
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02557
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02579
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0237
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02661
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02472 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-267
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-363
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00 |
| filingDate |
2003-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2005-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005537644-A |
| titleOfInvention |
Hybrid beam deposition system and method for fabricating metal oxide ZnO films, p-type ZnO films, and ZnO-based II-VI compound semiconductor devices |
| abstract |
【Task】 A hybrid beam deposition (HBD) system and method according to the present invention is a pulsed laser deposition (PLD) method and apparatus and apparatus and method for supplying a radical oxygen radio frequency plasma stream on a deposition substrate. A unique combination with an apparatus and method for effectively synthesizing metal oxide thin films by effectively increasing the available reactive oxygen flux density is used. The HBD system and method of the present invention further includes a combination of a PLD apparatus and method with molecular beam epitaxy (MBE) and / or chemical vapor deposition (CVD) method and apparatus, a radical oxygen radio frequency plasma flow, The synthesis of doped and / or doped metal oxide thin films and the radical oxygen radio frequency plasma flow supplying elemental raw materials for the synthesis of undoped and / or doped metal-based oxide alloy thin films are integrated. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020072231-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7174996-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011502364-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8268075-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9806212-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021147702-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210123881-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014026099-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010512664-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102385038-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210115736-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5196655-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102336228-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7042320-B2 |
| priorityDate |
2002-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |