http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6952542-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate | 2017-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6952542-B2 |
| titleOfInvention | Plasma processing method and plasma processing equipment |
| priorityDate | 2017-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.