| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F25B2400-0411
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F25B49-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F25B2400-0403
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F25B2600-2501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F25B2339-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F25B39-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2018-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2021-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-6886940-B2 |
| titleOfInvention |
Plasma processing method |
| priorityDate |
2018-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |