http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6817889-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32266 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2017-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6817889-B2 |
| titleOfInvention | Plasma processing equipment and plasma processing method |
| priorityDate | 2016-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6857644 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578866 |
Total number of triples: 16.