http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6425587-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N31-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2015-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6425587-B2 |
| titleOfInvention | Plasma analyzer, plasma analysis system, and plasma analysis method |
| priorityDate | 2015-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 56.