http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6177168-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-22 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2014-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-6177168-B2 |
| titleOfInvention | Etching work material and etching method using the same |
| priorityDate | 2013-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 503.